MUT 2017

16th International Workshop on Micromachined Ultrasonic Transducers


PROGRAMME - PDF version of the Programme and Abstracts now Available

PRESENTATIONS - PDF version of the Presentations now Available

Wednesday 28 June 2017






Session 1 - Fabrication I

Chair: Erik Vilain Thomsen, Technical University of Denmark


Investigation of the acoustic properties of porous silicon layers used as backing for CMUT

J. Lascaud, C. Compère, T. Defforge, A. Boulmé, D. Alquier, G. Gautier and D. Certon

Université François Rabelais de Tours, CNRS, CEA, INSA-CVL, GREMAN UMR7347, 16 Rue P. et M. Curie, 37071 Tours, Cedex 2, France



High-frequency Ultrasound Arrays using Micromachined Single Crystal 1-3 Composites

Sibo Li, Huaiyu Wu and Xiaoning Jiang

North Carolina State University, Raleigh, NC, USA


Vented CMUT Design for Wide Bandwidth Airborne Applications

H. K. Oguz, B. Ma, C. Chang, K. Firouzi, and B. T. Khuri-Yakub

E. L. Ginzton Laboratory, Stanford University, Stanford, CA 94305



Session 2 - Fabrication II

Chair: Abdullah Atalar, Bilkent University


Process optimisation of BCB-polymer for use in row-column addressed CMUTs

Martin Lind Ommen, Andreas Havreland, and Erik Vilain Thomsen

Department of Micro and Nanotechnology, Technical University of Denmark, Lyngby, Denmark


Row-column addressed CMUT based on the polymer BCB

Andreas Spandet Havreland, Martin Lind Ommen, Chantal Silvestre, Mathias Engholm, and Erik Vilain Thomsen

Department of Micro and Nanotechnology, Technical University of Denmark, Kgs. Lyngby, Denmark


Pad printing as an enabling technology for capacitive transducer manufacture

James T. Andrews1, Andrew Tweedie2, Richard L. OLeary1

1Dept. of Electronic and Electrical Engineering, University of Strathclyde, Glasgow, Scotland, UK

2PZFlex, Glasgow, UK


“Pipe Organ” Air-coupled Broad Bandwidth Transducer

Botong Zhu1, Benjamin Tiller1, Alan J. Walker3, James F.C. Windmill1, Anthony J. Mulholland2

1Centre for Ultrasonic Engineering, University of Strathclyde Glasgow G1 1XW, United Kingdom

2Department of Mathematics and Statistics, University of Strathclyde Glasgow G1 1XH, United Kingdom

3School of Science and Sport, University of the West of Scotland Paisley PA1 2BE, United Kingdom



Session 3 - Applications

Chair: Levent Degertekin, Georgia Institute of Technology


Combined colorimetric and gravimetric CMUT sensor for detection of phenylacetone

Mathias J. G. Mølgaard, Milan Laustsen, Ida L. Thygesen, Mogens H. Jakobsen and Erik V. Thomsen

DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark,


Feasibility of interstitial MR-guided high intensity ultrasound heating with CMUTs: in-vivo study in pig brain

W. Apoutou N’Djin1, Jérémy Vion1, Loïc Daunizeau1, Christopher Bawiec1, Guillaume Bouchoux1,2, Nicolas Sénégond3, Jean-Yves Chapelon1, Alexandre Carpentier2

1Inserm, U1032, LabTAU, Lyon, F-69003, France; Univ Lyon, Université Lyon 1, Lyon, F-69003, France

2CarThera Research Team, Brain and Spine Institute, Pitié Salpêtrière Hospital, Paris, 75013, France

3Vermon SA, Tours, 37038, France


Recent Advancements on the Development of CMUT Probes for 2D and 3D Medical Ultrasound Imaging

Alessandro Stuart Savoia, Barbara Mauti, Giosuè Caliano

Department of Engineering, Roma Tre University, Rome, Italy


Investigation of a planar 64-element CMUT truncated annular phased array for creating thermal lesions in biological tissue

C. Bawiec1, W.A. N'Djin1, G. Bouchoux1, N. Sénégond2, N. Guillen3, J.Y. Chapelon1

1 Inserm, U1032, LabTau, Lyon, F-69003, France; Université, Lyon 1, Lyon, F-69003, France

2 Vermon, Tours, 37038, France

3 EDAP TMS, Vaulx-en-Velin, 69120, France



Session 4 - Electronics Integration

Chair: Richard O’Leary, University of Strathclyde


Integrated Receiver Electronics for a CMUT Array

Y. Kansu, C. Bulbul, H. Köymen, A. Atalar

Electrical and Electronics Engineering Department, Bilkent University, Ankara, Turkey


Supply-Doubled Pulse-Shaping Pulser and Supply-Inverted Bipolar

Gwangrok Jung1, Amirabbas Pirouz1, Coskun Tekes2, F. Levent Degertekin*1,2, and Maysam Ghovanloo1

1School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia, USA

2School of Mechanical Engineering at the Georgia Institute of Technology, Atlanta, Georgia, USA


CMOS-Design of a Cascadable Front-End ASIC for CMUT Arrays

Sandro G. Koch, Andreas Weder, Marcus Pietzsch, Andreas Heinig, Marco Kircher, Mario Grafe, Nicolas Lange, Jörg Amelung

Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden, Germany,


Sponsor presentations


End of first day presentations


Civic reception, Glasgow City Chambers

Thursday 29 June 2017

Session 5 - Simulation

Chair: Nicola Lamberti, University of Salerno


Simulating CMUT Arrays Using Time Domain FEA

Mathias Engholm1, Andrew Tweedie2, Søren Elmin Diederichsen1, Gerald Harvey3, Jørgen Arendt Jensen4, and Erik Vilain Thomsen1

1Department of Micro and Nanotechnology, Technical University of Denmark, Kgs. Lyngby, Denmark

2PZFlex, Glasgow, United Kingdom

3PZFlex, Cupertino, USA

4Center for Fast Ultrasound Imaging, Technical University of Denmark, Kgs. Lyngby, Denmark


A hybrid boundary element model for the simulation of large PMUT arrays in immersion

Bernard Shieh, Karim G. Sabra, F. Levent Degertekin

G.W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA USA,


Frequency-Tunability of a Collapse-Mode CMUT: from modelling to pre-clinical imaging

Martin Pekař1,2, Nenad Mihajlović1, Alexander F. Kolen1, Harm Belt1, Jeannet van Rens1, Frank Budzelaar1, Bas Jacobs1, Frank van Heesch1, Wendy U. Dittmer1, Debbie Rem-Bronneberg1, Stephan H. M. van Nispen3, Rob H. B. Fey3, Sergei Shulepov1, Henk Nijmeijer3, Imo E. Hoefer4, Tamas Szili-Török2, Hendrik J. Vos2,5, Johan G. Bosch2, Gijs van Soest2, Nico de Jong2,5, Antonius F. W. van der Steen2,5

1Philips Research, Eindhoven, the Netherlands

2Erasmus MC, Rotterdam, the Netherlands

3Department of Mechanical Engineering, Eindhoven University of Technology, the Netherlands

4Faculty of Veterinary Medicine, Utrecht University, the Netherlands

5Dept. of Imaging Physics, Delft University of Technology, Delft, the Netherlands


The Effect of Insulator Charging on CMUT Performance

Hayrettin Köymen1, Abdullah Atalar1, Saadettin Güler2, Itır Köymen1, A.Sinan Taşdelen2, and Aslı Ünlügedik2

1Electrical and Electronics Engineering Department, Bilkent University, Ankara, Turkey

2Bilkent University Acousticsand Underwater Technologies Research Center (BASTA), Bilkent University, Ankara, Turkey


Multiphysics Model and Experimental Validation of an Air-Coupled PMUT at 100 kHz

G. Massimino1, L. D’Alessandro1, F. Procopio2, R. Ardito1, M. Ferrera2, A. Corigliano1

1Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milan, Italy

2Analog, MEMS & Sensors Group, ST Microelectronics, Via Olivetti 2, 20100 Agrate Brianza, Italy



Session 6 - Characterisation

Chair: Giosue Caliano, Roma Tre


Characterization infrastructure for the CMUT platform

Chris van Heesch, Peter Dirksen, Marco de Wild

Philips Research, Eindhoven, The Netherlands,


Output Pressure and Pulse-Echo Characteristics of CMUTs as Function of Plate Thickness

Søren Elmin Diederichsen, Jesper Mark Fly Hansen, Mathias Engholm, Jørgen Arendt Jensen, and Erik Vilain Thomsen

Technical University of Denmark, 2800 Kgs. Lyngby, Denmark


Analysis and representation of DHM® data for MUT and SAW analysis

Yves Emery, Jérôme Parent, Eduardo Solanas, Etienne Cuche

Lyncée Tec SA, Lausanne, Switzerland




MUT2017 Best Paper


MUT 2018


Discussion and Closing Remarks


Departure for Tour

© Richard O'Leary 2016